Published 2017 | Version v1
Journal article

Analysis of Multilayer Devices for Superconducting Electronics by High-Resolution Scanning Transmission Electron Microscopy and Energy Dispersive Spectroscopy

  • 1. Sandia National Laboratory (SNL-NM), Albuquerque, NM (United States)
  • 2. New York University, NY (United States)

Description

We used a focused ion beam to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). An automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.

Availability note (English)

Available from http://www.osti.gov/pages/biblio/1356860; DOE Accepted Manuscript full text, or the publishers Best Available Version will be available free of charge after the embargo period

Additional details

Publishing Information

Journal Title
IEEE Transactions on Applied Superconductivity (Print)
Journal Volume
27
Journal Issue
4
Journal Page Range
4 p.
ISSN
1051-8223

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