Published 1973
| Version v1
Journal article
Ion implantation in semiconductors
Creators
- 1. Commission of the European Communities, Ispra (Italy). Joint Nuclear Research Center
Description
no abstract available
Additional details
Publishing Information
- Journal Title
- Euro-Spectra
- Journal Volume
- 12
- Journal Issue
- 3
- Series
- Euro-Spectra.
- Journal Page Range
- 58-72
INIS
- Country of Publication
- European Commission (EC), Brussels (Belgium)
- Country of Input or Organization
- European Commission (EC), Brussels (Belgium)
- INIS RN
- 5142278
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- CRYSTAL DOPING; ION IMPLANTATION; SEMICONDUCTOR DEVICES; SEMICONDUCTOR MATERIALS