Profile monitoring and calibration of ion beam density using Faraday cup detector

Chromium nitride films are known as good protective layers for both corrosion and wear attack. These coatings have been studying in more detail during recent years. The importance of the deposition parameters is critical. There are many methods for preparation of chromium nitride. One of them is IBAD (Ion Beam Assisted Deposition) method. Until now several methods have been used for the controlling of ion flux but results is not satisfactory yet. For this purpose a High Voltage Engineering Europe B.V. Faraday cup was used. On the basis of this device we fabricated the equipment for profile monitoring of ion beam density on the TECVAC 221 Ion Implanter. This mechanical xy-scanner consists of two stepping-motors, Faraday cup detector, scrolling mechanism and other additional belongings. Program in C was written to control two stepping-motors, which moved the detector into preferred points of cross sections of the ion beam. XY-scanner can be applied in the region of dimensions 200 x 200 mm. Other program served to estimate the value of ion beam density and to plot the graph, which illustrated the profile of ion beam density. Using our equipment we performed calibration of Ion Implantator - estimated distribution of ion beam density. Using these data we can perform CrN coatings with controlled composition and their properties. (Authors)