Microfabrication on Teflon surface by MeV-proton-microbeam and keV-nitrogen-ion-beam irradiation

Polytetrafluoroethylene (PTFE) and fluorinated ethylene propylene (FEP) are fluoropolymers that have several desirable technological properties, such as electrical insulation and chemical inertness. Nitrogen ion beam irradiation at high fluence forms dense microprotrusions on PTFE and FEP surfaces. Such unique surface structures are useful in cell culture dishes where cells can attach and spread on top of the protrusions. To enhance this functionality, control of surface morphology is necessary. In this study, we create smooth patterns between micro-protrusions by using focused MeV proton beam scanning and subsequent keV nitrogen ion beam irradiation. As a result, many double bonds (C=C) and oxygen-containing groups were detected by attenuated total reflectance/Fourier infrared spectroscopy, particularly in the smooth areas