A microfabricated strain gauge array on polymer substrate for tactile neuroprostheses in rats

In this study, we present the design, microfabrication and characterization of a tactile sensor system which can be used for sensory neuroprostheses in rats. The sensor system consists of an array of 2  ×  7 cells, each of which has a series combination of four strain gauges. Each group of four strain gauges is placed around a square membrane with a size of 2.5  ×  2.5 mm². Unlike most common tactile sensors based on silicon substrates, we used 3D-printed polylactic acid as a substrate, because it is not brittle, and under local extremes, it would prevent the catastrophic failure of all cells. The strain gauges were fabricated by depositing and patterning a 50 nm thick aluminum (Al) film on a polyimide sheet with a thickness of 0.125 mm. Polydimethylsiloxane (PDMS) elastomer was bonded on the top surface of the PI membrane. The PDMS layer was prepared in two different thicknesses, 1.2 and 1.7 mm, to investigate its effect on the static response of the sensor. The sensitivity and the maximum allowable force, corresponding to the maximum deformation of 0.9 mm at the center of each cell, changed based on the thickness of the PDMS layer. Sensor cells operated linearly up to 3 N with an average sensitivity of 200 mΩ N⁻¹ (0.7 Ω mm⁻¹) for 1.2 mm thick PDMS. These values changed to 4 N and 70 mΩ N⁻¹ (0.3 Ω mm⁻¹), respectively, for 1.7 mm thick PDMS. The nonlinearity was less than 3%. The cells had low cross-talk (∼5 mΩ N⁻¹ and 0.02 Ω mm⁻¹) relative to the average sensitivity. Additionally, the dynamic response of the sensor was characterized at several frequencies by using a vibrotactile stimulation system previously designed for psychophysics experiments. The sensor was also tested inside the rat conditioning chamber to demonstrate the relevant signals in a tactile neuroprosthesis. (paper)