Characterisation of titanium nitride films obtained by metalorganic chemical vapor deposition (MOCVD)
Creators
- 1. Instituto de Pesquisas Energeticas e Nucleares (CCTM/IPEN/CNEN-SP), Sao Paulo, SP (Brazil). Centro de Ciencia e Tecnologia de Materiais
- 2. Universidade de Sao Paulo (IF/USP), SP (Brazil). Inst. de Fisica
- 3. Instituto de Pesquisas Energeticas e Nucleares (IPEN/CNEN-SP), Sao Paulo, SP (Brazil)
- 4. Fundacao de Amparo a Ciencia e Tecnologia de Pernambuco (FACEPE), Recife, PE (Brazil)
- 5. Universidade Federal de Pernambuco (IF/UFPE), Recife, PE (Brazil). Inst. de Fisica
Description
Ceramic coatings have been widely used as protective coating to improve the life of cutting tools, for corrosion protection and in microelectronics, optical and medical areas. Transition metals nitrides are of special interest due to its high hardness and thermal stability. In this work thin films of titanium nitride were obtained by MOCVD (metalorganic chemical vapor deposition) process. The tests were carried out for 1h at 700 deg C under 80 and 100 mbar of pressure. The characterization was made by using scanning electron microscopy coupled with dispersive energy analysis, and X-ray diffraction. Preliminary results suggested that Ti2N phase was formed and that the growth rate varied between 4 and 13 nm/min according to the process parameter considered. (author)
Files
42105325.pdf
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Additional details
Additional titles
- Original title (Portuguese)
- Caracterizacao de filmes de nitreto de titanio obtidos por MOCVD
Publishing Information
- Imprint Pagination
- 9 p.
- Report number
- INIS-BR--10297
Conference
- Title
- 53. Brazilian congress on ceramics
- Original Conference Title
- 53. Congresso brasileiro de ceramica
- Dates
- 7-10 Jun 2009
- Place
- Guaruja, SP (Brazil)
INIS
- Country of Publication
- Brazil
- Country of Input or Organization
- Brazil
- INIS RN
- 42105325
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CRYSTALLOGRAPHY; DIFFUSE SCATTERING; DISPERSION HARDENING; ENERGY ANALYSIS; SCANNING ELECTRON MICROSCOPY; STRUCTURAL CHEMICAL ANALYSIS; TITANIUM; TITANIUM NITRIDES; X RADIATION; X-RAY DIFFRACTION
- Descriptors DEC
- COHERENT SCATTERING; DIFFRACTION; ELECTROMAGNETIC RADIATION; ELECTRON MICROSCOPY; ELEMENTS; HARDENING; IONIZING RADIATIONS; METALS; MICROSCOPY; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; RADIATIONS; SCATTERING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS