Published October 23, 1984 | Version v1
Patent Metadata-only

Apparatus for irradiation with charged particle beams

Creators

Description

An apparatus according to the present invention for irradiating a specimen with charged particle beams comprises a single charged particle generating source from which the charged particle beams formed of electrons and negative ions, respectively, can be simultaneously derived; a specimen holder on which the specimen is placed; and charged particle irradiation means which is interposed between the charged particle generating source and the specimen holder in order to focus the charged particle beams and to irradiate the surface of the specimen with the focused beams, and which includes at least one magnetic lens and at least one electrostatic lens that are individually disposed

Availability note (English)

U.S. Commissioner of Patents, Washington, D.C. 20231, USA, $.50.

Additional details

Publishing Information

Imprint Pagination
v p.
IPC:
Int. Cl. G01N 23/04; G01N 23/225; H01J 3/14.
IPC
Int. Cl. G01N 23/04; G01N 23/225; H01J 3/14.
Patent number
US patent document 4,479,060/A/

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
16061787
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Non-conventional Literature
Descriptors DEI
BEETLES; CATHODE RAY TUBES; CHARGED PARTICLES; ELECTRON BEAMS; ELECTROSTATICS; IRRADIATION; IRRADIATION DEVICES; LENSES; MAGNETIC FIELDS; RADIATION SOURCES; TISSUES
Descriptors DEC
ANIMALS; ARTHROPODS; BEAMS; BODY; ELECTRON TUBES; INSECTS; INVERTEBRATES; LEPTON BEAMS; PARTICLE BEAMS

Optional Information

Notes
PAT-APPL-454027.