Published July 2016 | Version v1
Journal article

Electronegativity-dependent tin etching from thin films

  • 1. Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, Drienerlolaan 5, Enschede (Netherlands)

Description

The influence of a thin film substrate material on the etching of a thin layer of deposited tin (Sn) by hydrogen radicals was studied. The amount of remaining Sn was quantified for materials that cover a range of electronegativities. We show that, for metals, etching depends on the relative electronegativity of the surface material and Sn. Tin is chemically etched from surfaces with an electronegativity smaller than Sn, while incomplete Sn etching is observed for materials with an electronegativity larger than Sn. Furthermore, the amount of remaining Sn increases as the electronegativity of the surface material increases. We speculate, that, due to Fermi level differences in the material's electronic structure, the energy of the two conduction bands shift such that the availability of electrons for binding with hydrogen is significantly reduced.

Additional details

Identifiers

Publishing Information

Journal Title
AIP Advances
Journal Volume
6
Journal Issue
7
Journal Page Range
p. 075222-075222.8
ISSN
2158-3226
CODEN
AAIDBI

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
48057615
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
AVAILABILITY; ELECTRONEGATIVITY; ELECTRONIC STRUCTURE; ELECTRONS; ETCHING; FERMI LEVEL; HYDROGEN; SUBSTRATES; SURFACES; THIN FILMS; TIN
Descriptors DEC
ELEMENTARY PARTICLES; ELEMENTS; ENERGY LEVELS; FERMIONS; FILMS; LEPTONS; METALS; NONMETALS; SURFACE FINISHING

Optional Information

Notes
(c) 2016 Author(s)