Carbon and nitrogen co-doping self-assembled MoS₂ multilayer films

Highlights: • Mo–S–C–N composite films were synthesized by using reactive magnetron sputtering. • A self-assembled multilayer structure with periodicity in the nanometer scale was formed in the composite film. • The hardness of Mo–S–C–N film deposited at optimized parameter reaches up to 9.76 GPa. • The wear rate of deposited Mo–S–C–N film both in vacuum and ambient atmosphere decreases dramatically. - Abstract: Mo–S–C–N composite films were prepared using reactive magnetron sputtering of graphite and MoS₂ targets in argon and nitrogen atmospheres. The effects of carbon/nitrogen co-doping and carbon concentration on the composition, microstructure, mechanical and tribological properties of deposited films have been investigated by various characterization techniques. The results show that the deposited films comprise MoS₂ nanocrystalline and amorphous carbon, and the incorporating nitrogen forms Mo-N and C–N chemical bonds. Increasing carbon concentration leads to the increase of sp² carbon fraction in the films. Furthermore, the high-resolution transmission electron microscopy reveals that a self-assembled multilayer structure with periodicity in the nanometer scale is formed in the Mo–S–C–N film. Benefiting from the composite and self-assembled multilayer structures, the hardness of Mo–S–C–N film deposited at optimized parameter reaches up to 9.76 GPa, and corresponding friction experiment indicates that this composite films display low friction coefficient and high wear resistance both in vacuum and ambient air conditions.