Multiple-quantum NMR study of clustering in hydrogenated amorphous silicon

Multiple-quantum nuclear-magnetic-resonance techniques are used to study the distribution of hydrogen in hydrogenated amorphous silicon. Using the fact that multiple-quantum excitation is limited by the size of the dipolar-coupled spin system, we show that the predominant bonding environment for hydrogen is a cluster of four to seven atoms. For device quality films, the concentration of these cluster defects increases with increasing hydrogen content. At very high hydrogen content, the clusters are replaced with a continuous network of silicon-hydrogen bonds