On kinetics of charged particle implantation in dielectrics taking into account the effect of space charge build-up

The effect of the space charge accumulation on depth distributions of charged particles in dielectric for different duration of irradiation has been considered. An analytical solution of transfer equation for heavy charged particles with provision for the effect of a self-consistent field of the space charge has been obtained. Derived were formulae for distributions in ranges and density of stopped particles in the case of slow particles (initial velocity V0< or approximately 108 cm/s), fast particles (V0 >> 108 cm/s) and for the case when the bremsstrahlung capability of the medium may be approximated with a constant T0/R0, where T0 - initial kinetic energy of particles, R0 - maximum range