Published December 17, 2002
| Version v1
Journal article
Preparation of crystalline Si1-xGex thin films by pulsed ion-beam evaporation
Creators
- 1. Extreme Energy-Density Research Institute, Nagaoka University of Technology, Nagaoka 940-2188 (Japan)
- 2. Department of Electrical Engineering, Nagaoka University of Technology, Nagaoka 940-2188 (Japan)
Description
Thin films of single phase, polycrystalline silicon germanium (Si1-xGex) were prepared by ion-beam evaporation (IBE) using Si-Ge multi-phase targets. After the irradiation of the targets by an pulsed light ion beam with peak energy of 1 MV, 450 and 480 nm thick films were deposited on Si single crystal and quartz glass substrates, respectively. From XRD analysis, the thin films consisted of a single phase Si1-xGex, whose composition is close to those of the targets
Additional details
Identifiers
- DOI
- 10.1063/1.1530886;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 650
- Journal Issue
- 1
- Journal Page Range
- p. 417-420
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 14. international conference on high-power particle beams
- Acronym
- BEAMS 2002
- Dates
- 23-28 Jun 2002
- Place
- Albuquerque, NM (United States)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36064931
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- DEPOSITION; EVAPORATION; GERMANIUM; GERMANIUM COMPOUNDS; GLASS; ION BEAMS; IRRADIATION; LIGHT IONS; MONOCRYSTALS; PLASMA; POLYCRYSTALS; QUARTZ; SILICON; SILICON COMPOUNDS; SUBSTRATES; THIN FILMS; X-RAY DIFFRACTION
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; COHERENT SCATTERING; CRYSTALS; DIFFRACTION; ELEMENTS; FILMS; IONS; METALS; MINERALS; OXIDE MINERALS; PHASE TRANSFORMATIONS; SCATTERING; SEMIMETALS
Optional Information
- Notes
- (c) 2002 American Institute of Physics