Physico-chemical modifications of solid surfaces by interaction with ion beams

The physico-chemical processes occurring in the particle (ion, electron, photon) bombardment of a surface are reviewed, with particular emphasis on the ion beam-solid interaction. The main factors influencing the chemical reactions which occur by ion bombardment will be discussed in terms of Lindhard-Scharff-Schiott (LSS) theory on the basis of experimental data obtained on both organic and inorganic simple systems as well as on polymers. Some typical reaction schemes will be reported and the modification of the physical properties of the bombarded surface will be shown to be connected with the chemical nature of the products formed as a consequence of the energy deposition of the ion beam. A few examples showing the importance of the above phenomena in the field of surface and interface analysis will be given. (Author)