Simulation and deconvolution program WinRNRA for depth profiling of light elements via nuclear resonance reactions

In this paper, a Windows PC-program is described that performs the transformation of measurement spectra obtained by resonant nuclear reaction analysis (RNRA) into concentration depth profiles. For the shape of the resonance a simple Breit-Wigner form is implemented. For the calculation of the straggling both the Bohr and the Lindhard-Scharff models can be used. The program can be used to evaluate depth profiles of an element in an otherwise homogeneous target. A nanometer depth scale is obtained by considering the concentration-dependent densities of the phases. This is exploited for the investigation of nitrogen profiles via the resonance reaction 15N(p,αγ)12C. For demonstration purposes the program is used to determine nitrogen depth profiles of laser nitrided iron