Published August 22, 2003 | Version v1
Journal article

Fabrication of nano-gap electrodes using electroplating technique

Description

We report a simple and controllable method for fabricating a pair of electrodes with a sub-10-nm gap, namely nano-gap electrodes, by using a conventional electroplating technique. A pair of initial electrodes with a 100-200 nm gap is fabricated by electron beam lithography, and then gold is deposited electrochemically to reduce this gap. A sub-10-nm gap is produced by halting the electroplating just before the electrodes make contact with each other. We also use our technique to fabricate nano-gap electrodes with a gold and a platinum finger, and with three gold fingers

Additional details

Identifiers

DOI
10.1016/S0040-6090;
PII
S0040609003007375;

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
438-439
Journal Issue
1-2
Journal Page Range
p. 317-321
ISSN
0040-6090
CODEN
THSFAP

Conference

Title
5. international conference on nano-molecular electronics
Dates
10-12 Dec 2002
Place
Kobe (Japan)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
37013515
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ELECTRODES; ELECTRON BEAMS; ELECTROPLATING; FABRICATION; GOLD; PLATINUM
Descriptors DEC
BEAMS; DEPOSITION; ELECTRODEPOSITION; ELECTROLYSIS; ELEMENTS; LEPTON BEAMS; LYSIS; METALS; PARTICLE BEAMS; PLATING; PLATINUM METALS; SURFACE COATING; TRANSITION ELEMENTS

Optional Information

Copyright
Copyright (c) 2003 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.