Published August 22, 2003
| Version v1
Journal article
Fabrication of nano-gap electrodes using electroplating technique
Description
We report a simple and controllable method for fabricating a pair of electrodes with a sub-10-nm gap, namely nano-gap electrodes, by using a conventional electroplating technique. A pair of initial electrodes with a 100-200 nm gap is fabricated by electron beam lithography, and then gold is deposited electrochemically to reduce this gap. A sub-10-nm gap is produced by halting the electroplating just before the electrodes make contact with each other. We also use our technique to fabricate nano-gap electrodes with a gold and a platinum finger, and with three gold fingers
Additional details
Identifiers
- DOI
- 10.1016/S0040-6090;
- PII
- S0040609003007375;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 438-439
- Journal Issue
- 1-2
- Journal Page Range
- p. 317-321
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- 5. international conference on nano-molecular electronics
- Dates
- 10-12 Dec 2002
- Place
- Kobe (Japan)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37013515
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ELECTRODES; ELECTRON BEAMS; ELECTROPLATING; FABRICATION; GOLD; PLATINUM
- Descriptors DEC
- BEAMS; DEPOSITION; ELECTRODEPOSITION; ELECTROLYSIS; ELEMENTS; LEPTON BEAMS; LYSIS; METALS; PARTICLE BEAMS; PLATING; PLATINUM METALS; SURFACE COATING; TRANSITION ELEMENTS
Optional Information
- Copyright
- Copyright (c) 2003 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.