Published November 28, 2015
| Version v1
Journal article
Perpendicular coercivity enhancement of CoPt/TiN films by nitrogen incorporation during deposition
Creators
- 1. Department of Metallurgy and Ceramics Science, Tokyo Institute of Technology, 2-12-1, Ookayama, Meguro-ku, Tokyo 152-8552 (Japan)
- 2. National Institute for Materials Science (NIMS), Sengen 1-2-1, Tsukuba, Ibaraki 305-0047 (Japan)
- 3. Hungarian Academy of Sciences, Research Institute for Technical Physics and Materials Science, H-1121 Budapest, Konkoly-Thege ut 29-33 (Hungary)
Description
The effect of N incorporation on the structure and magnetic properties of CoPt thin films deposited on glass substrates with TiN seed layers has been investigated. During the deposition of CoPt, introducing 20% N2 into Ar atmosphere promotes the (001) texture and enhances the perpendicular coercivity of CoPt film compared with the film deposited in pure Ar and post-annealed under the same conditions. From the in situ x-ray diffraction results, it is confirmed that N incorporation expands the lattice parameter of CoPt, which favors the epitaxial growth of CoPt on TiN. During the post-annealing process, N releases from CoPt film and promotes the L10 ordering transformation of CoPt
Additional details
Identifiers
- DOI
- 10.1063/1.4936365;
Publishing Information
- Journal Title
- Journal of Applied Physics
- Journal Volume
- 118
- Journal Issue
- 20
- Journal Page Range
- p. 203907-203907.4
- ISSN
- 0021-8979
- CODEN
- JAPIAU
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 47063100
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; ARGON; COBALT COMPOUNDS; COERCIVE FORCE; CONTROLLED ATMOSPHERES; DEPOSITION; GLASS; LATTICE PARAMETERS; MAGNETIC PROPERTIES; NITROGEN; PLATINUM COMPOUNDS; TEXTURE; THIN FILMS; TITANIUM NITRIDES; X-RAY DIFFRACTION
- Descriptors DEC
- ATMOSPHERES; COHERENT SCATTERING; DIFFRACTION; ELEMENTS; FILMS; FLUIDS; GASES; HEAT TREATMENTS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PHYSICAL PROPERTIES; PNICTIDES; RARE GASES; SCATTERING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- (c) 2015 AIP Publishing LLC