Quantitative element- and component analysis by X-ray fluorescence

The equations of the Fundamental Parameter Method for compact samples, thin layers and thin multilayers as well as the equations of the Empirical Coefficient Method are derived in a unified manner and compiled. The latter method is suitable for element analysis and component analysis likewise. A set of pressed powder samples of aluminium-, titanium- and chromium oxide were used in an experimental check of the equation. It is found that component analysis is considerably more dependent on the choice of standards that the conventional element analysis. However with a proper choice of standards component analysis results in a significantly higher accuracy. (Author, translated by G.Q.)