TEM characterization of a Cr/Ti/TiC graded interlayer for magnetron-sputtered TiC/a-C:H nanocomposite coatings

A TiC/a-C:H nanocomposite coating is deposited on top of a Cr/Ti/TiC graded interlayer. Cross-section transmission electron microscopy is employed to investigate the detailed structure of the interlayer and the coating. Five different phases are formed as a consequence of the compositional gradient within the interlayer: pure Cr, a solid solution of Ti in Cr, a Ti/Cr amorphous/nanocrystalline phase, α-Ti and TiC. Solid state amorphization occurs during the interlayer deposition to give a dispersion of TiCr β-phase nanocrystals in an amorphous matrix. The TiC phase is textured and contains numerous stacking faults as a result of the growth in under-stoichiometric carbon concentration. C-enriched columnar boundaries are present within the coating, originating from the TiC column boundaries of the interlayer. The work indicates that an interlayer of amorphous/nanocrystalline Ti/Cr phase would reduce the presence of growth defects such as columnar boundaries within nanocomposite TiC/a-C:H coatings