Published June 1973
| Version v1
Report
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Sputter deposition and ion plating technology
Description
no abstract available
Availability note (English)
MF available from INIS under the Report Number.
Files
Additional details
Publishing Information
- Imprint Pagination
- 51 p.
- Report number
- SLA--73-619
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 5093746
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- BIBLIOGRAPHIES; DEPOSITION; ION BEAMS; PLATING; REVIEWS; SPUTTERING; SUBSTRATES
- Descriptors DEC
- BEAMS; DOCUMENT TYPES; SURFACE COATING