Published June 1973 | Version v1
Report Restricted

Sputter deposition and ion plating technology

Description

no abstract available

Availability note (English)

MF available from INIS under the Report Number.

Files

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Additional details

Publishing Information

Imprint Pagination
51 p.
Report number
SLA--73-619

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
5093746
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
BIBLIOGRAPHIES; DEPOSITION; ION BEAMS; PLATING; REVIEWS; SPUTTERING; SUBSTRATES
Descriptors DEC
BEAMS; DOCUMENT TYPES; SURFACE COATING