Magnetic field influence on the discharge parameters of two-stage gas-metal plasma source

The discharge parameters and vacuum regimes of the two-stage gas-metal plasma source are presented for three configurations of magnetic field. Distributions of deposited flows, current and voltage characteristics of the discharge, current characteristics for reflective electrodes and target are presented. Discharge voltage is 30...150 V, discharge current is up to 25 A. The gas discharge is initiated on air. Vapors of copper were used for discharges in metal. The evaporation rates of copper are obtained at the level of 20...30 g/h. The results of study have shown that mass distribution of flows deposited on the vacuum chamber walls significant deviated from Knudsen-Lamberg law described of evaporation in vacuum.