Published 1974 | Version v1
Report

Investigation of electron irradiation effects on SiO2--Si surfaces using the energy distribution of secondary electrons

Description

no abstract available

Additional details

Publishing Information

Imprint Pagination
107 p.

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
6195805
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Thesis, Non-conventional Literature
Descriptors DEI
ELECTRIC POTENTIAL; ELECTRON BEAMS; LAYERS; N-TYPE CONDUCTORS; OXIDES; P-TYPE CONDUCTORS; PHYSICAL RADIATION EFFECTS; SECONDARY EMISSION; SILICON; SILICON OXIDES; SURFACES; THICKNESS
Descriptors DEC
BEAMS; CHALCOGENIDES; DIMENSIONS; ELEMENTS; EMISSION; LEPTON BEAMS; OXYGEN COMPOUNDS; PARTICLE BEAMS; RADIATION EFFECTS; SEMICONDUCTOR MATERIALS; SEMIMETALS; SILICON COMPOUNDS

Optional Information

Notes
University Microfilms Order No. 75-6405.