A gold and aluminium implanted standard for ion beam experiments

The status of the Rutherford backscattering standards project comprising a dual implant of Au and Al in a vitreous carbon substrate is reported. The absolute Au and Al contents have been measured by Rutherford backscattering indepently of the charge Q on the target, or the solid angle Ω, by depositing absolutely calibrated thin uniform evaporated layers over the implanted targets. Photon activation analysis has also been used as an independent check on the implanted contents. High resolution Rutherford backscattering by electrostatic analysis has been used to deduce the range and profile of the implanted species and the effect of reversing the implantation sequence is reported. (orig.)