Published May 15, 1991
| Version v1
Journal article
CO2-laser-induced chemical vapour deposition of TiB2
- 1. Lab. for Physical Chemistry, Univ. of Amsterdam (Netherlands)
- 2. LAICA LTV, Amsterdam (Netherlands)
Description
Titanium diboride (TiB2) was photothermally deposited by the reduction of TiCl4 and BCl3. A CO2 laser was the only source of activation. A temperature feedback system was developed to increase the control of the CO2-laser-induced chemical vapour deposition (LCVD) process. In the LCVD process, powder production is prevented and high growth are obtained. The deposition process, which was optimized with respect to the growth rate, resulted in very hard TiB2 coatings (VHN25>300kg mm-2). (orig.)
Additional details
Publishing Information
- Journal Title
- Surface and Coatings Technology
- Journal Volume
- 45
- Journal Issue
- 1-3
- Series
- Surf. Coat. Technol.
- Journal Page Range
- 105-113
- ISSN
- 0257-8972
- CODEN
- SCTEE
Conference
- Title
- Symposium D on metallurgical coatings and materials surface modifications in conjunction with the spring meeting of the European Materials Research Society (E-MRS).
- Dates
- 29 May - 1 Jun 1990.
- Place
- Strasbourg (France).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Switzerland
- INIS RN
- 23000875
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ACTIVATION ENERGY; BORON CHLORIDES; CARBON DIOXIDE LASERS; CHEMICAL VAPOR DEPOSITION; COATINGS; FEEDBACK; HIGH TEMPERATURE; LASER-RADIATION HEATING; POWDERS; PRESSURE DEPENDENCE; SCANNING ELECTRON MICROSCOPY; TEMPERATURE DEPENDENCE; TITANIUM BORIDES; TITANIUM CHLORIDES; VERY HIGH TEMPERATURE
- Descriptors DEC
- AMPLIFIERS; BORIDES; BORON COMPOUNDS; CHEMICAL COATING; CHLORIDES; CHLORINE COMPOUNDS; DEPOSITION; ELECTRON MICROSCOPY; ENERGY; EQUIPMENT; GAS LASERS; HALIDES; HALOGEN COMPOUNDS; HEATING; LASERS; MICROSCOPY; PLASMA HEATING; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS