Development of synchrotron radiation source

IHI Synchrotron radiation source (called LUNA), mainly purposed on the VLSI lithography light source, has been developed since April, 1987. It was completed to install in April, 1989 at the ISRF (IHI synchrotron radiation facility at Tsuchiura) and commissioning test including individual performance test of main components started from May. In December, soft X-ray emitted from electron beam accelerated to final energy of 800 MeV was observed. LUNA is now being intensively operated to achieve the final targeted specification. In 1991, our first lithography test is supposed to be done, using SR from LUNA. The general outline of the project including developmental history, the present status, the design and fabrication of main components and future development plan is given in this paper. (author)