Published April 15, 1981
| Version v1
Journal article
Surface acoustic waves in the study of ion implanted surface layers
Description
Surface acoustic waves (SAW) have been used in the present work to study changes of mechanical properties of surface layers during ion implantation. The SAW propagation velocity is measured during implantation as a function of implanted ion type and dose. The possibility of travelling SAW visualization to study the formation of macroscopic clusters in the implanted surface layers is demonstrated. (orig.)
Additional details
Publishing Information
- Journal Title
- Nucl. Instrum. Methods
- Journal Volume
- 182/183
- Journal Issue
- pt.2
- Series
- Nucl. Instrum. Methods.
- Journal Page Range
- 761-767
- ISSN
- 0029-554X
Conference
- Title
- 2. international conference on ion beam modification of materials.
- Dates
- 14 - 18 Jul 1980.
- Place
- Albany, NY, USA.
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 12633656
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, Numerical Data
- Descriptors DEI
- ELECTRON SCANNING; EXPERIMENTAL DATA; HELIUM IONS; ION IMPLANTATION; LAYERS; LITHIUM COMPOUNDS; MATERIALS TESTING; NIOBIUM OXIDES; SOUND WAVES; SURFACES
- Descriptors DEC
- ALKALI METAL COMPOUNDS; CHALCOGENIDES; CHARGED PARTICLES; DATA; INFORMATION; IONS; NIOBIUM COMPOUNDS; NUMERICAL DATA; OXIDES; OXYGEN COMPOUNDS; TESTING; TRANSITION ELEMENT COMPOUNDS