Published 1997
| Version v1
Miscellaneous
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Cobalt alloy ion sources for focused ion beam implantation
Creators
- 1. Paul Scherrer Inst. (PSI), Villigen (Switzerland)
- 2. Eidgenoessische Technische Hochschule, Zurich (Switzerland)
Description
Cobalt alloy ion sources have been developed for silicide formation by focused ion beam implantation. Four eutectic alloys AuCo, CoGe, CoY and AuCoGe were produced by electron beam welding. The AuCo liquid alloy ion source was investigated in detail. We have measured the emission current stability, the current-voltage characteristics, and the mass spectrum as a function of the mission current. (author) 1 fig., 2 refs
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Additional details
Publishing Information
- Publisher
- Paul Scherrer Institut.
- Imprint Place
- Villigen PSI (Switzerland)
- Imprint Title
- Paul Scherrer Institut annual report 1996. Annex IIIA: solid state research at large facilities
- Imprint Pagination
- 180 p.
- Journal Page Range
- p. 45.
- Report number
- INIS-CH--004
INIS
- Country of Publication
- Switzerland
- Country of Input or Organization
- Switzerland
- INIS RN
- 28056545
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Numerical Data
- Descriptors DEI
- COBALT ALLOYS; ELECTRON BEAM WELDING; EXPERIMENTAL DATA; GERMANIUM ALLOYS; GOLD ALLOYS; ION IMPLANTATION; ION SOURCES; MASS SPECTRA; YTTRIUM ALLOYS
- Descriptors DEC
- ALLOYS; DATA; FABRICATION; INFORMATION; JOINING; NUMERICAL DATA; SPECTRA; TRANSITION ELEMENT ALLOYS; WELDING