Published April 1975 | Version v1
Journal article Metadata-only

Heavy ion implantation into silicon monocrystals

Creators

  • 1. Joint Inst. for Nuclear Research, Dubna (USSR)

Description

no abstract available

Additional details

Additional titles

Original title (Russian)
Внедрение тяжелых ионов в монокристаллы кремния

Publishing Information

Journal Title
Fiz. Tverd. Tela
Journal Volume
17
Journal Issue
4
Series
Fiz. Tverd. Tela.
Journal Page Range
1080-1084

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
6214058
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
COMPARATIVE EVALUATIONS; DATA; DEPTH DOSE DISTRIBUTIONS; GRAIN ORIENTATION; HEAVY IONS; ION IMPLANTATION; KEV RANGE 10-100; MONOCRYSTALS; RANGE; SILICON
Descriptors DEC
CHARGED PARTICLES; CRYSTAL STRUCTURE; CRYSTALS; ELEMENTS; ENERGY RANGE; INFORMATION; IONS; KEV RANGE; MICROSTRUCTURE; ORIENTATION; RADIATION DOSE DISTRIBUTIONS; SEMIMETALS; SPATIAL DOSE DISTRIBUTIONS

Optional Information

Notes
For English translation see the journal Sov. Phys.-Solid State.