Breakdown mechanism of an atmospheric-pressure radio-frequency capacitive argon discharge in parallel-plate bare metal electrodes

The breakdown behavior of an atmospheric-pressure radio-frequency capacitively coupled argon plasma discharge at 13.56 MHz is investigated in order to produce a stable and homogeneous atmospheric-pressure argon glow discharge. It is found that the electrode separation distance plays a pivotal role in exciting argon discharge whether in mobility-controlled electric breakdown or in diffusion-controlled breakdown and the discharge mode (arc discharge, α-mode glow discharge, or γ-mode glow discharge) immediately following breakdown is closely related to the breakdown mechanism.