Different aspects of self-consistent modeling of non-equilibrium discharges

Self-consistent models for homogeneous and one dimensional DC and RF discharges are illustrated for different chemical systems. In particular the coupling between vibrational kinetics, electronic kinetics and Boltzmann equation for the electron energy distribution function is illustrated in the case of nitrogen plasmas. Different self-consistent models including the homogeneous solution of Boltzmann equation, fluid model and PIC-MCC (particle in cell with Monte Carlo collisions) are then used for understanding RF discharges. In all cases it is emphasized the role of the coupling between heavy particle kinetics and free electrons dynamics. copyright 1996 American Institute of Physics