Published May 26, 2006 | Version v1
Journal article

Evidence for direct activation of solid surface by plasma discharge on CFC decomposition

  • 1. Institute for Environmental Management Technology, National Institute of Advanced Industrial Science and Technology, AIST Tsukuba West, 16-1 Onogawa, Tsukuba, Ibaraki 305-8569 (Japan)

Description

Role of the TiO2 catalyst under plasma discharge was investigated on the decomposition of CClF3 in Ar at atmospheric pressure. It was found that the removal rate of CClF3 increased using a plasma reactor packed with TiO2 compared with a conventional reactor. Carbon oxides and hydrogenated compound were detected even in the absence of oxygen and hydrogen sources. In order to clarify the sources of these products, we tried the measurement of chemical species desorbed from TiO2 by plasma discharge, resulting that molecular oxygen and hydrogen were detected in the gas phase. From these findings, it was suggested that the lattice oxygen and the surface OH on the metal oxides could be activated directly by plasma discharge

Additional details

Identifiers

DOI
10.1016/j.tsf.2005.08.098;
PII
S0040-6090(05)01296-4;

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
506-507
Journal Page Range
p. 373-377
ISSN
0040-6090
CODEN
THSFAP

Conference

Title
Joint meeting of 7. APCPST (Asia Pacific conference on plasma science and technology) and 17. SPSM (symposium on plasma science for materials)
Dates
29 Jun - 2 Jul 2004
Place
Fukuoka (Japan)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
38004631
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ATMOSPHERIC PRESSURE; CARBON OXIDES; CHLOROFLUOROCARBONS; DECOMPOSITION; FREONS; HYDROGEN; OXYGEN; PLASMA; TITANIUM OXIDES
Descriptors DEC
CARBON COMPOUNDS; CHALCOGENIDES; CHEMICAL REACTIONS; ELEMENTS; HALOGENATED ALIPHATIC HYDROCARBONS; NONMETALS; ORGANIC CHLORINE COMPOUNDS; ORGANIC COMPOUNDS; ORGANIC FLUORINE COMPOUNDS; ORGANIC HALOGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Copyright
Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.