Annealing-induced near-surface ordering in disordered Ga0.5In0.5P
Creators
- 1. National Renewable Energy Laboratory, Golden, Colorado 80401 (United States)
- 2. National Tsing Hua University, Hsinchu, Taiwan 30043 (Taiwan, Province of China)
Description
Most samples of Ga0.5In0.5P grown by metalorganic chemical vapor deposition (MOCVD) on (001)-like surfaces are partially ordered and exhibit distinctive reflectance difference spectral (RDS) features associated with the anisotropic properties of the ordered bulk structure. It is known that the ordering is not a ground-state property of the bulk but is surface-induced during growth. On the other hand, Ga0.5In0.5P grown by liquid-phase epitaxy (LPE) is completely disordered, and it has been shown that its RD spectrum is essentially featureless. In this article, we present a study of the effects of annealing (in a PH3/H2 atmosphere) on LPE-grown Ga0.5In0.5P using ex situ and in situ RDS. The annealing temperatures and times used in this study (650 degree C and tens of minutes) have virtually no effect on the bulk optical or structural properties of MOCVD-grown Ga0.5In0.5P. For LPE-grown Ga0.5In0.5P, we find that annealing induces bulk-like RDS features at both E0 and E1 with line shapes similar to those observed for MOCVD-grown ordered Ga0.5In0.5P. These bulk-like spectral features are, however, due to near-surface reconstruction of Ga and In because they are effectively quenched by exposure to air. Also, the E0 feature becomes sharper and both the E0 and the E1 features red-shift as the annealing process is prolonged. This indicates that this reconstruction is kinetically limited, presumably by the slow interdiffusion of Ga and In necessary to achieve the ordered bulk-like structure. copyright 1995 American Vacuum SocietyGa0.5In0.5P
Additional details
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
- Journal Volume
- 13
- Journal Issue
- 4
- Journal Page Range
- p. 1755-1759.
- ISSN
- 0734-211X
- CODEN
- JVTBD9
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 26076247
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; DIFFUSION; EPITAXY; GALLIUM PHOSPHIDES; INDIUM PHOSPHIDES; ORDER-DISORDER TRANSFORMATIONS; SURFACE PROPERTIES; TEMPERATURE RANGE 0400-1000 K; THIN FILMS
- Descriptors DEC
- CRYSTAL GROWTH METHODS; FILMS; GALLIUM COMPOUNDS; HEAT TREATMENTS; INDIUM COMPOUNDS; PHASE TRANSFORMATIONS; PHOSPHIDES; PHOSPHORUS COMPOUNDS; PNICTIDES; TEMPERATURE RANGE