Published August 2006 | Version v1
Journal article

Oxygen depth profiling by resonant RBS in NiTi after plasma immersion ion implantation

  • 1. Leibniz-Institut fuer Oberflaechenmodifizierung, Permoserstr. 15, 04303 Leipzig (Germany)
  • 2. Institut fuer Physik, Universitaet Augsburg, 86135 Augsburg (Germany)

Description

NiTi exhibits super-elastic as well as shape-memory properties, which results in a large potential application field in biomedical technology. Using oxygen ion implantation at elevated temperatures, it is possible to improve the biocompatibility. Resonant Rutherford backscattering spectroscopy (RRBS) is used to investigate the oxygen depth profile obtained after oxygen plasma immersion ion implantation (PIII) at 25 kV and 400-600 deg. C. At all temperatures, a layered structure consisting of TiO2/Ni3Ti/NiTi was found with sharp interfaces while no discernible content of oxygen inside Ni3Ti or nickel in TiO2 was found. These data are compatible with a titanium diffusion from the bulk towards the implanted oxygen

Additional details

Identifiers

DOI
10.1016/j.nimb.2006.04.027;
PII
S0168-583X(06)00476-9;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
249
Journal Issue
1-2
Journal Page Range
p. 355-357
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
17. international conference on ion beam analysis
Dates
26 Jun - 1 Jul 2005
Place
Sevilla (Spain)

Optional Information

Copyright
Copyright (c) 2006 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.