Published November 1, 2000
| Version v1
Journal article
Extreme ultraviolet holographic microscopy and its application to extreme ultraviolet mask-blank defect characterization
Description
no abstract available
Additional details
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. B, Microelectronics and Nanometer Structures
- Journal Volume
- 18
- Journal Issue
- 6
- Journal Page Range
- [10 p.]
- ISSN
- 1520-8567
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 33054470
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- CRYSTAL DEFECTS; HOLOGRAPHY; MICROSCOPY; ULTRAVIOLET RADIATION; USES
- Descriptors DEC
- CRYSTAL STRUCTURE; ELECTROMAGNETIC RADIATION; RADIATIONS
Optional Information
- Contract/Grant/Project number
- AC03-76SF00098
- Notes
- Journal Publication Date: November 2000
- Funding organization
- US Department of Energy (United States)
- Secondary number(s)
- LBNL/ALS--13686