Published October 1975 | Version v1
Journal article Metadata-only

On applicability of solid sphere models in cathode sputtering

Creators

  • 1. Tashkentskij Gosudarstvennyj Univ. (USSR)

Description

no abstract available

Additional details

Additional titles

Original title (Russian)
О применимости модели твердых шаров в катодном распылении

Publishing Information

Journal Title
Fiz. Tverd. Tela
Journal Volume
17
Journal Issue
10
Series
Fiz. Tverd. Tela.
Journal Page Range
3040-3042

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
8288141
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract
Descriptors DEI
CATHODE SPUTTERING; COPPER; ENERGY DEPENDENCE; EV RANGE 100-1000; ION BEAMS; ION-ATOM COLLISIONS; MERCURY IONS; POLYCRYSTALS
Descriptors DEC
ATOM COLLISIONS; ATOMIC IONS; BEAMS; CHARGED PARTICLES; COLLISIONS; CRYSTALS; ELEMENTS; ENERGY RANGE; EV RANGE; ION COLLISIONS; IONS; METALS; SPUTTERING; TRANSITION ELEMENTS

Optional Information

Notes
Published in summary form only; for English translation see the journal Sov. Phys. - Solid State.