Published February 2010 | Version v1
Journal article Metadata-only

Sol-gel-derived lead-magnesium-niobium titanate thin films for ultrahigh-value capacitor applications

Creators

  • 1. Tyndall National Institute, Advanced Materials and Surfaces Group, Lee Maltings, Prospect Row, Cork (Ireland)
  • 2. Jozef Stefan Institute, Electronic Ceramics Department, Jamova 39, 1000 Ljubljana (Slovenia)
  • 3. CEA, LETI, MINATEC, 17 Rue des Martyrs, F38054 Grenoble Cedex 9 (France)

Description

A Pb(Mg0.33Nb0.67)0.65Ti0.35O3 material system was synthesized by the sol-gel method; thin films were deposited via the spin-coating technique, and processed using the rapid thermal annealing. Effects of preparation parameters, such as annealing temperature and atmosphere, on the phase composition, microstructure and electrical properties were identified. Morphologically uniform and crack-free films were obtained. Among the obtained films, the highest k value was found to be 1425 for the 380 nm thick film that was annealed at 750 deg. C in O2 indicating the suitability of this material system for ultrahigh-value capacitor applications.

Availability note (English)

Available from http://dx.doi.org/10.1088/1757-899X/8/1/012007

Additional details

Identifiers

DOI
10.1088/1757-899X/8/1/012007;

Publishing Information

Journal Title
IOP Conference Series. Materials Science and Engineering (Online)
Journal Volume
8
Journal Issue
1
Journal Page Range
[4 p.]
ISSN
1757-899X

Conference

Title
Symposium G - Fundamentals and technology of multifunctional oxide thin films
Acronym
E-MRS 2009 spring meeting
Dates
8-12 Jun 2009
Place
Strasbourg (France)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
43019012
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; CAPACITORS; ELECTRICAL PROPERTIES; LEAD; MAGNESIUM; MICROSTRUCTURE; NIOBIUM; SOL-GEL PROCESS; SPIN-ON COATING; THIN FILMS; TITANATES
Descriptors DEC
ALKALINE EARTH METALS; DEPOSITION; ELECTRICAL EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; HEAT TREATMENTS; METALS; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; REFRACTORY METALS; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS