Design, simulation, production and initial characterisation of 3D silicon detectors
- 1. Department of Physics and Astronomy, University of Glasgow, Glasgow G12 8QQ (United Kingdom)
- 2. Instituto de Microelectronica de Barcelona, IMB-CNM-CSIC, 08193 Bellaterra, Barcelona (Spain)
Description
3D detectors are photodiode radiation detectors with n- and p-type electrode columns passing through a silicon substrate. This structure makes it possible to achieve a very small electrode spacing without reducing the sensitive thickness. This greatly reduces the detector's depletion voltage and collection time, and hence improves its radiation hardness. This could make 3D detectors useful as pixel detectors for future high-luminosity colliders, such as the Super-LHC. The research institute IMB-CNM (Centro Nacional de Microelectronica, Barcelona) have produced 3D pad, pixel and strip detectors with a 'double-sided 3D' structure. This fabrication has been done alongside design and simulation work at the University of Glasgow. The first devices produced by CNM have been successfully IV and CV tested, and source tests are ongoing. Additionally, this conference record discusses work done by other 3D detector collaborations: Stanford, Manchester University and Sintef; FBK (Trento); and Glasgow, Diamond Light Source and IceMOS Ltd.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.nima.2008.08.077Additional details
Identifiers
- DOI
- 10.1016/j.nima.2008.08.077;
- PII
- S0168-9002(08)01192-3;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment
- Journal Volume
- 598
- Journal Issue
- 1
- Journal Page Range
- p. 67-70
- ISSN
- 0168-9002
- CODEN
- NIMAER
Conference
- Title
- 10. international conference on instrumentation for colliding beam physics
- Dates
- 28 Feb - 5 Mar 2008
- Place
- Novosibirsk (Russian Federation)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 41009502
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CERN LHC; DESIGN; DIAMONDS; ELECTRIC POTENTIAL; ELECTRODES; EQUIPMENT; FABRICATION; HARDNESS; LIGHT SOURCES; LUMINOSITY; SEMICONDUCTOR MATERIALS; SI SEMICONDUCTOR DETECTORS; SILICON; SIMULATION; SUBSTRATES; THICKNESS
- Descriptors DEC
- ACCELERATORS; CARBON; CYCLIC ACCELERATORS; DIMENSIONS; ELEMENTS; MATERIALS; MEASURING INSTRUMENTS; MECHANICAL PROPERTIES; MINERALS; NONMETALS; OPTICAL PROPERTIES; PHYSICAL PROPERTIES; RADIATION DETECTORS; RADIATION SOURCES; SEMICONDUCTOR DETECTORS; SEMIMETALS; STORAGE RINGS; SYNCHROTRONS
Optional Information
- Copyright
- Copyright (c) 2008 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.