Published February 1986
| Version v1
Journal article
Isotope effects on angular distribution of sputtering atoms
- 1. Academia Sinica, Shanghai (China). Shanghai Inst. of Nuclear Research
- 2. Shanghai Inst. of Semiconductor Device (China)
Description
The isotopes enrichment behavior of copper element as a function of sputtered atoms ejection angle has been studied at 50 KeV Ar+ sputtering ion energy under normal incidence. The present results indicate that the lighter isotope is unenrichment, but the heavier isotope becomes enriched over the ejection angle range from ∼5 deg to ∼80 deg
Additional details
Publishing Information
- Journal Title
- Nucl. Tech.
- Journal Issue
- no.2
- Series
- Nucl. Tech.
- CODEN
- NUTED
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 18053723
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ANGULAR DISTRIBUTION; ARGON IONS; COPPER 63; COPPER 65; ISOTOPE EFFECTS; ISOTOPE RATIO; MASS SPECTROSCOPY; SPUTTERING
- Descriptors DEC
- CHARGED PARTICLES; COPPER ISOTOPES; DISTRIBUTION; INTERMEDIATE MASS NUCLEI; IONS; ISOTOPES; NUCLEI; ODD-EVEN NUCLEI; SPECTROSCOPY; STABLE ISOTOPES