Kinetics of the reactions involving CF2 and CF in a pure tetrafluoromethane plasma: 1. Production of CF2 and CF via electron-impact dissociation

By means of laser-induced fluorescence one studied kinetics of formation and decomposition of CF2 and CF radicals in a glow discharge in pure CF4. One determined the efficient constants of dissociation rate of CF4 molecules by electron impact against the channels with formation of CF2 and CF radicals within wide electric field range. One determined contribution of dissociation channel of CF4 molecules by electron impact into radical formation and one determined the constants of CF4 dissociation rate by electron impact, that was, kCF2 and kCF. Comparison of kCF2 and kCF derived values with the results of calculations based on solution of the Boltzmann equation and on the published data on cross sections of electron impact dissociation of CF4 molecules enabled to normalize those cross sections and to constant model cross sections of electron impact CF4 dissociation with neutral products