Published June 2003
| Version v1
Journal article
High-stability quartz-crystal microbalance for investigations in surface science
- 1. Department of Physics, Trent University, Peterborough, Ontario K9J 7B8 (Canada)
Description
This article describes a high-stability quartz-crystal microbalance (QCM) and the methodology for measuring the change in mass during thin-film growth in deposition and sputter processes. Much lower noise and higher-frequency stability have been achieved than with conventional QCMs. A stability of ±0.1 Hz at 6 MHz has been obtained over 4 h, with a rms stability of 0.03 Hz. The adsorption of one atomic monolayer of oxygen produces a frequency shift of about 5 Hz, so this stability enables the QCM to be used to determine the stoichiometry of submonolayer oxide films, as well as for high-accuracy measurements of adsorbate sticking probability and ion-milling rate
Additional details
Identifiers
- DOI
- 10.1063/1.1574395;
Publishing Information
- Journal Title
- Review of Scientific Instruments
- Journal Volume
- 74
- Journal Issue
- 6
- Journal Page Range
- p. 3039-3044
- ISSN
- 0034-6748
- CODEN
- RSINAK
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 35057385
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Numerical Data
- Descriptors DEI
- ACCURACY; ADSORPTION; CRYSTAL GROWTH; CRYSTALS; DEPOSITION; ELECTROMECHANICS; EXPERIMENTAL DATA; KINETICS; MASS; MICROBALANCES; OXIDES; OXYGEN; PIEZOELECTRICITY; PROBABILITY; QUARTZ; RESONATORS; SPUTTERING; STABILITY; THIN FILMS
- Descriptors DEC
- BALANCES; CHALCOGENIDES; DATA; ELECTRICITY; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; INFORMATION; MEASURING INSTRUMENTS; MECHANICS; MINERALS; NONMETALS; NUMERICAL DATA; OXIDE MINERALS; OXYGEN COMPOUNDS; SORPTION; WEIGHT INDICATORS
Optional Information
- Notes
- (c) 2003 American Institute of Physics.