Differential Phase-Contrast Scanning X-Ray Microscope For Observation Of Low-Z element Specimen

Differential phase-contrast scanning x-ray microscope/microtomography have been developed. A fast readout charge-coupled device (CCD) camera coupled with a visible-light conversion unit is used as a detector to record the transmitted intensity distribution of far-field image for every pixel in a scan. Simultaneous absorption and phase-contrast images are given from a single scan by image-processing of the CCD frames. The system is constructed at BL20XU of SPring-8, and its feasibility is demonstrated at the photon energy of 8 keV. A tantalum test chart is observed and its finest structure of 140 nm pitch pattern is clearly observed. Measured phase sensitivity is approximately λ/270. Some low-Z element specimens are observed and obtained phase contrast image shows much higher sensitivity than that of absorption contrast.