Published November 1993 | Version v1
Journal article Metadata-only

Present status of Super-ALIS

Creators

  • 1. Nippon Telegraph and Telephone Corp., Atsugi, Kanagawa (Japan). LSI Lab.

Description

Nippon Telegraph and Telephone Corporation (NTT) started X-ray lithography research in mid-1970s by developing masks, steppers, and X-ray sources. On the basis of their results, NTT then started to construct the superconducting compact storage ring, Super-ALIS, for nano-technologies in 1985, and began using it in 1989 to develop future low-power-consumption telecommunication LSIs. This paper introduces NTT's SR facility and its applications to LSI technologies, including the latest results. (author)

Additional details

Publishing Information

Journal Title
Hoshako
Journal Volume
6
Journal Issue
4
Journal Page Range
p. 413-420.
ISSN
0914-9287
CODEN
HSHKE2

INIS

Country of Publication
Japan
Country of Input or Organization
Japan
INIS RN
25044501
Subject category
S43: PARTICLE ACCELERATORS;
Descriptors DEI
ACCELERATOR FACILITIES; INTEGRATED CIRCUITS; MEV RANGE 100-1000; STORAGE RINGS; SUPERCONDUCTING MAGNETS; SYNCHROTRON RADIATION SOURCES; X-RAY RADIOGRAPHY
Descriptors DEC
ELECTRICAL EQUIPMENT; ELECTROMAGNETS; ELECTRONIC CIRCUITS; ENERGY RANGE; EQUIPMENT; MAGNETS; MEV RANGE; RADIATION SOURCES; SUPERCONDUCTING DEVICES