A femtosecond laser-induced two-photon photopolymerization technique for structuring microlenses

Light-initiated quasi-instant solidification of a liquid polymer is attractive for its ultra-precise spatial and temporal control of the photochemical reaction. In this paper we present microlenses structured by femtosecond laser-induced photopolymerization. Due to nonlinear phenomena the fabrication resolution is not restricted to the diffraction limit for the applied laser excitation wavelength but is determined by the intensity of a focused beam. Furthermore, pin-point structuring enables one to produce three-dimensional structures of any form from the photopolymer. The smallest structural elements of 200 nm lateral dimensions can be achieved reproducibly by using high numerical aperture oil immersion focusing optics (NA = 1.4). Axial resolution (which is fundamentally a few times worse than lateral resolution due to the distribution of light intensity in the focal region) can be controlled to a precision of a few hundred nanometers by decreasing the scanning step. In our work we applied the commercially available and widely used zirconium–silicon based hybrid sol–gel photopolymer (Ormosil, SZ2080). Arrays of custom-parameter spherical microlenses for microscopy applications have been fabricated. Their surface roughness, focal distance and imaging quality were tested. The obtained results show potential for fast and flexible fabrication of custom-parameter microlenses by the proposed technique