Nuclear analytical method using a small cyclotron

The facility of nuclear analytical method with a small cyclotron has been developed in NTT Opto-electronics Lsboratories. Accurate and precise method of charged particle activation analysis was studied in order to determine boron, carbon, nitrogen and oxygen and these elements in electronic material as low as 1 ppb could be determined. Elastic backscatteing analysis with around 7 MeV alpha beam was also studied and it is found that the method is applicable for total analysis of thin oxide film. From these results, it is confirmed that a small cyclotron is usefull for nuclear analytical methods. (author)