Published January 19, 2007
| Version v1
Journal article
Beamlines on Indus-1 and Indus-2 for X-ray Multilayer Optics and Micro Fabrication Research
- 1. Synchrotron Utilisation and Material Research Division, Raja Ramanna Centre for Advanced Technology, Indore-452 013 (India)
Description
A soft X-ray/extreme ultra violet (EUV) reflectometry beamline is operational at Indus-1 synchrotron source. The beamline is used for the characterization of multilayer optics for EUV lithography. A soft/deep X-ray lithography beamline is being set up on Indus-2, for undertaking research activities on micro electro mechanical systems (MEMS) and sub micron X-ray lithography structures. Present status of these beamlines is presented
Additional details
Identifiers
- DOI
- 10.1063/1.2436343;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 879
- Journal Issue
- 1
- Journal Page Range
- p. 1474-1477
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 9. international conference on synchrotron radiation instrumentation
- Dates
- 28 May - 2 Jun 2006
- Place
- Daegu (Korea, Republic of)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 39061413
- Subject category
- S43: PARTICLE ACCELERATORS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BEAM PRODUCTION; ELECTROMECHANICS; FABRICATION; INDUS-1; INDUS-2; LAYERS; MICROSTRUCTURE; OPTICS; SOFT X RADIATION; ULTRAVIOLET RADIATION
- Descriptors DEC
- ELECTROMAGNETIC RADIATION; IONIZING RADIATIONS; MECHANICS; RADIATION SOURCES; RADIATIONS; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES; X RADIATION
Optional Information
- Notes
- (c) 2007 American Institute of Physics