Published 1987 | Version v1
Miscellaneous Metadata-only

Temporal development of RF capacitively and inductively coupled plasmas

Creators

  • 1. Australian National Univ., Canberra. Plasma Research Lab.

Description

no abstract available

Additional details

Publishing Information

Imprint Title
16th AINSE plasma physics conference
Imprint Pagination
107 p.
Journal Page Range
p. 66.
Report number
INIS-mf--11089

Conference

Title
16. AINSE plasma physics conference.
Dates
9-11 Feb 1987.
Place
Lucas Heights (Australia).

INIS

Country of Publication
Australia
Country of Input or Organization
Australia
INIS RN
19010237
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
BREAKDOWN; MAGNETIC FIELDS; PLASMA; PLASMA PRODUCTION; RF SYSTEMS

Optional Information

Notes
Abstract only.