Characterisation of sub-micrometre features with the FE-EPMA

The goal of this work is to compare two strategies for doing sub-micrometre analyses using the Fe-Ni binary system, as an example. The first approach involves reducing the overvoltage to 1 – 3 kV over the critical ionisation energy of the K X-ray lines. Using such a small overvoltage greatly restricts the size of the analytical volume. Upon entering the sample, the beam electrons quickly lose the additional energy required to excite the X-rays of interest. As a result, the K X-ray line for Fe and Ni will only be produced very near the surface. The second strategy is to use the L-lines for Fe and Ni, and drop the accelerating voltage to a level that will produce the smallest overall interaction volume of the beam electrons. Each strategy has its advantages and disadvantages that depend on the ultimate goal of the analysis and the elements involved. Both methods produce small analytical volumes. However, the L-lines from the transition elements are more problematic because of uncertainties with their mass absorption coefficients. Therefore, using the L-lines in low-kV analyses are more challenging to get good quantitative results. The advantage of using L-lines is that they travel a shorter distance within the sample, and therefore secondary fluorescence becomes less of an issue. The best results will come from a combination of these strategies. Using a multiple kV approach allows the user to select the optimum conditions for each element