MoS2 sputtering coating for ultrahigh vacuum manipulation

Lubrication applied to sliding part is one of the key components for the development of high performance driving mechanism and manipulator in ultrahigh vacuum. Some solid lubrication has been widely used for this purpose, especially molybdenum disulfide (MoS2). Low friction, low wear and low outgassing during the sliding motion on lubrication are required for a high performance manipulation in ultrahigh vacuum. Although the tribology of MoS2 has been reported to be suitable in a vacuum, the outgassing characteristics while sliding are not clean, in this work, we investigate the characteristics of MoS2 sputtering coating in order to develop high performance ultrahigh vacuum driving mechanism. Their friction and outgassing characteristics were evaluated and we have found out suitable parameters for manipulation.