Published July 2007
| Version v1
Journal article
X-ray measurements with micro- and nanoresolution at BESSY
- 1. UGC-DAE Consortium for Scientific Research, University Campus, Khandwa Road, Indore 4520017 (India)
- 2. Hahn-Meitner-Institute Berlin, Glienicker Str. 100, D-14109 Berlin (Germany)
- 3. Department of Physics, University of Roma Tre, Rome (Italy)
- 4. BESSY GmbH, Albert-Einstein Str. 15, D-12349 Berlin (Germany)
Description
Capabilities of the KMC-2 beamline at BESSY for spatially resolved X-ray measurements with micro- and nanometer resolution have been reviewed. A combination of experimental methods of X-ray fluorescence analysis and extended X-ray absorption fine spectroscopy with X-ray standing waves technique was applied for the depth profiling of Si/W/Si layers with sub-nanometer resolution. The investigated layers were placed into the waveguide structure formed by two Au films to increase sensitivity and accuracy of the measurements. In-depth resolution on the order of 1 nm for the structure measurements has been obtained
Availability note (English)
Available from http://dx.doi.org/10.1016/j.sab.2007.02.017Additional details
Identifiers
- DOI
- 10.1016/j.sab.2007.02.017;
- PII
- S0584-8547(07)00050-X;
Publishing Information
- Journal Title
- Spectrochimica Acta. Part B, Atomic Spectroscopy
- Journal Volume
- 62
- Journal Issue
- 6-7
- Journal Page Range
- p. 622-625
- ISSN
- 0584-8547
- CODEN
- SAASBH
Conference
- Title
- 18. international congress on X-ray optics and microanalysis
- Acronym
- ICXOM 2005
- Dates
- 25-30 Sep 2005
- Place
- Frascati, Rome (Italy)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 39081097
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ABSORPTION SPECTROSCOPY; BESSY STORAGE RING; FILMS; FINE STRUCTURE; RESOLUTION; SENSITIVITY; STANDING WAVES; WAVEGUIDES; X RADIATION; X-RAY FLUORESCENCE ANALYSIS
- Descriptors DEC
- CHEMICAL ANALYSIS; ELECTROMAGNETIC RADIATION; IONIZING RADIATIONS; NONDESTRUCTIVE ANALYSIS; RADIATIONS; SPECTROSCOPY; STORAGE RINGS; X-RAY EMISSION ANALYSIS
Optional Information
- Copyright
- Copyright (c) 2007 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.