Published October 1983
| Version v1
Journal article
Fine-grained base electrode process for Pb-alloy Josephson technology
Creators
- 1. IBM T. J. Watson Research Center, Yorktown Heights, New York 10598
Description
A method of producing fine-grained PbInAu thin films reported by Huang and co-workers has been evaluated for use in Josephson technology integrated circuits. Both junction-related and nonjunction characteristics of the base electrode layer were considered. It was found necessary to interchange the order of deposition of two of the layers in the vertical structure and to modify the homogenization step in the base electrode process. The fine grain size of the films was found to be due to the presence of a layer of AuIn2 precipitates which impede grain growth
Additional details
Publishing Information
- Journal Title
- J. Vac. Sci. Technol., A
- Journal Volume
- 1
- Journal Issue
- 4
- Series
- J. Vac. Sci. Technol., A.
- Journal Page Range
- 1846-1851
- ISSN
- 0734-2101
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 15020665
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- BACKSCATTERING; COMPARATIVE EVALUATIONS; CURRENT DENSITY; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; ELECTRODES; ENERGY SPECTRA; FABRICATION; GOLD ALLOYS; HIGH VACUUM; INDIUM ALLOYS; INTEGRATED CIRCUITS; JOSEPHSON JUNCTIONS; LEAD ALLOYS; SPUTTERING; THIN FILMS; TRANSMISSION ELECTRON MICROSCO; VACUUM COATING
- Descriptors DEC
- ALLOYS; DEPOSITION; ELECTRON MICROSCOPY; ELECTRONIC CIRCUITS; FILMS; MICROSCOPY; PHYSICAL PROPERTIES; SCATTERING; SEMICONDUCTOR JUNCTIONS; SPECTRA; SURFACE COATING