Strong violet and green-yellow electroluminescence from silicon nitride thin films multiply implanted with Si ions
Creators
- 1. School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798 (Singapore)
- 2. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, Sichuan 610054 (China)
- 3. Institute of Materials Research and Engineering, Singapore 117602 (Singapore)
- 4. Department of Physics, University of Hong Kong (Hong Kong)
Description
Strong visible electroluminescence (EL) has been observed from a 30 nm silicon nitride thin film multiply implanted with Si ions and annealed at 1100 deg. C. The EL intensity shows a linear relationship with the current transport in the thin film at lower voltages, but a departure from the linear relationship with a quenching in the EL intensity is observed at higher voltages. The EL spectra show two primary EL bands including the predominant violet band at ∼3.0 eV (415 nm) and the strong green-yellow band at ∼2.2 eV (560 nm). Two weak bands including the ultraviolet band at ∼3.8 eV and the near infrared band at ∼1.45 eV emerge at high voltages. The evolution of each EL band with the voltage has been examined. The phenomena observed are explained, and the EL mechanisms are discussed
Additional details
Identifiers
- DOI
- 10.1063/1.3068002;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 94
- Journal Issue
- 4
- Journal Page Range
- p. 041102-041102.3
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 40051302
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; ELECTRIC POTENTIAL; ELECTROLUMINESCENCE; EV RANGE 01-10; ION IMPLANTATION; SILICON; SILICON IONS; SILICON NITRIDES; THIN FILMS; ULTRAVIOLET RADIATION
- Descriptors DEC
- CHARGED PARTICLES; ELECTROMAGNETIC RADIATION; ELEMENTS; EMISSION; ENERGY RANGE; EV RANGE; FILMS; HEAT TREATMENTS; IONS; LUMINESCENCE; NITRIDES; NITROGEN COMPOUNDS; PHOTON EMISSION; PNICTIDES; RADIATIONS; SEMIMETALS; SILICON COMPOUNDS
Optional Information
- Notes
- (c) 2009 American Institute of Physics